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基本工艺
Qulee with YTP-H 系列
Qulee with YTP-H BGM2-101
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多种真空设备的工艺管理，残留气体分析到R&D都可广泛应用。
特点
- 卓越的性价比 通过差分排气系统，可以在1台设备上实现从过程监控到残余气体分析（RGA）
- 紧凑的设计 采用标准排气装置Desktop YTP的紧凑型设计
- 显示部分一体化的设计 无需电脑也可进行测量
- 操作简单 - One Click机能（对每个人来说都很容易，不需要复杂的操作）
- 可以进行大气压分析 包括大气压分析在内，还有监测3000Pa，500Pa，100Pa，10Pa和1Pa的规格
- 可根据应用选择型号 质量数1 ～ 100（BGM2-101/102）、1 ～ 200（BGM2-201/202）、 1 ～ 300（HGM2-302）
- 低噪音： 运行时43dB(A)以下
- 无需真空计专用显示器：真空计信号可以在操作屏上显示（真空计可选）
- 完整的检漏功能 可以进行氦气检漏和漏气测试
- Qulee可对应Ethernet 标准配有QCS(Ver.4) 软件（Windows 7/8/10）
用途
- 研究开发用途的各种气体分析
- 溅射设备、真空蒸发设备等工艺中的气体监测
- 溅射设备、真空蒸发设备等的残留气体分析
- 高真空排气设备的残留气体分析
- 真空渗碳炉末端和氧浓度的确认
- 冷冻干燥设备的干燥点和杂质的确认
规格
| Qulee main body | Select from BGM2-101 / 102 / 201 / 202, HGM2-302 ＊Refer to the product catalogue for the specification of Qulee |
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| Software Qulee QCS Ver.4.0(Windows 7 / 8 / 10) | ||||
| Max sampling pressure | Select from atmospheric pressure 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa | |||
| Select from atmospheric pressure 22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr | ||||
| Select from atmospheric pressure 30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar | ||||
| ＊Atmospheric pressure type can be used only under the atomospheric condition ＊3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure |
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| Specification pressure | Vacuum type | Gas introduction type (3000Pa ～1Pa type) |
Manual bellows valve (2 systems: orifice line / direct line) Mating flange / ICF070 |
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| Variable leak valve type | Sampling pressure | Power-supply voltage | AC100-240V | |
| Atmospheric pressure type (Atmospheric pressure sampling unit) APS-001 |
Capillary type (100,000Pa type) | Dry pump(Sweep) | ６L/min, Ultimate pressure/6700Pa | |
| Controller unit | Temperature contol and On/Off control of cartridge heater, On/Off control of sweep pump | |||
| Capillary tube unit | Manual bellows valve (1 line), Cartridge heater, insulation mat, Capillary tube (already mounted), Joint fitting 1/4 ”Swagelok | |||
| Power-supply voltage | Select for AC100V/220V | |||
| Pump unit desktop YTP | Desktop YTP (YTP70A-D) |
Turbo molecular pump | 70L/s (N2) | |
| Dry pump(Roughing) | 19L/min(Diaphragm pump) | |||
| Power-supply voltage | AC100-240V | |||
| Accessories | AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Software installation disc, Bolt set for fixing flange, Gasket (UFC114G,UFC070G), Power strip(*3), Casters(*4), Various fixing screws | |||
| Options | Ionization gauge package(SH2-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(8 ports or 16 ports)(*5),Floor cart(*6) | |||
＊1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V. Three power codes are necessary for atomospheric pressure sampling unit, desktop YTP, and AC adapter for Qulee.
＊2 Make sure to use a base stage when installing desktop YTP. For atmospheric pressure type, it has two-stage structure so that a control unit can be attached.
＊3 Power strip only comes with atmosperic pressure/AC100V type.
＊4 Casters only come with atmospheric pressure type. Please attatch casters by yourself.
＊5 AC adapter is necessary for an optional switching hub.
＊6 Please set up the floor cart by yourself.
＊7 Desktop YTP, Qulee main body, gas inlet, and other parts will be packaged separately. Please refer to the assembly manual for set up.
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